McGraw-Hill Construction
   subscriptions  •   advertise  •   careers  •   contact us  •   my account  
 



email a friend  |  printer friendly version
Buildings

Semiconductor Plant Aims for High Sustainability

(enr.construction.com - 06/12/06)

By William J. Angelo

A new $300-million Texas Instruments Inc. semiconductor fabrication plant now nearing completion in Richardson, Texas, is going for the green, gold and silver. The green is an estimated $4 million in annual energy savings flowing primarily from an innovative HVAC system. Gold and silver may be Leadership in Energy and Environmental Design certifications for its office building and groundbreaking plant, respectively.

Savings. A Texas Instruments wafer plant in Texas could become a green trendsetter.

The 1.1-million-sq-ft fabrication plant, called ‘RFAB’, is part of Dallas-based TI’s sustainable building drive. “This building wraps all our best green practices with some new ideas for a whole system of sustainable design,” says Paul R. Westbrook, TI sustainability manager. “We had thought of building overseas but stayed after state and local property tax abatements totaling $295 million over 24 years were granted and the state gave $300 million in support to the University of Texas at Dallas, School of Engineering, which is important for our access to top-tier research.”

Big Thirst. New fab plant will reduce water consumption by a third in a drought area.
Once the decision was made to stay in Texas, TI went into a year-long planning mode. “They wanted to size it right and keep the price competitive with an overseas operation,” says Jim Carr, project manager for Austin-based CH2M Hill IDC, which performed process and clean room engineering as part of a design-build team led by Austin Commercial LP, Dallas. “We implemented design objectives without oversizing, which is a break with tradition because these firms usually build for the next generation,” he says.

Architectural work was performed by PageSoutherlandPage, Dallas, and structural engineering by Paragon Structural Design Inc., Phoenix. TI specifically requested that the project be certified under the LEED program, with a three-to-four-year payback.

When operational next year, the plant will produce thousands of chips on 300- mm-dia silicon wafers for use in cell phones and other electronic devices. “Because of global competition, particularly from China, we were asked to bring the project on line under $500 million and in 14 months,” says Steve B. Penson, Austin project executive. “It had to be $200 million cheaper than a comparable facility we did in Dallas in 1996 so we needed to lower initial building and operating costs. We reengineered the facility and implemented a new HVAC system.” According to Westbrook, RFAB came in 30% less per sq ft than the old facility.

advertisement

The new, fast-tracked facility has 225,000 sq ft of office space, a 150,000-sq-ft support building, an 80,000-sq-ft central plant and a 645,000-sq-ft fabrication building with a 220,000-sq-ft clean room. TI awarded Austin the contract in late 2004 and the project now is substantially complete. With equipment, the plant will cost a total of $3 billion.

“We were worried about the silver certification because fab plants are by nature huge energy hogs,” says Michael J. McCoy, PageSoutherlandPage vice president. An efficient heat-recovery system eliminates four of six boilers. “We used two different electrically controlled temperature chilled-water systems, 40°F and 54°F, a split chiller plant, and the waste heat off the 54° system was used to generate hot water for the plant,” says Penson. “Domestic hot water comes from four solar energy panels.” Other touches include a reflective roof, natural daylighting and smart light fixtures.

The green systems cost an additional $1.5 million but should pay for themselves in under two years. “Saving energy in one type of building is like saving energy in any other type,” says Westbrook. “It all comes down to good design. In this case, we made design decisions when electricity was less than .05 cents per kilowatt hour, and it is much higher now.”

As part of the green process, construction waste also was recycled, with only 10% going to landfill. “That is very unusual,” says Penson. “Typically you would see over 50%.”

A deionized water treatment plant will recapture and recycle water used in production, eliminating 35% of municipal water purchases. That is critical since Texas has been suffering from drought conditions. “Normally, we use about 3 million gallons per day,” says Westbrook. “With this system, we reduce that need by 1 mgd.”

Although the paperwork for LEED certification has not yet been completed, “we have a high level of confidence that we have generated sufficient points for gold and silver certification,” says Penson. “When they get it, RFAB will become the largest facility and the first wafer fab to receive a LEED designation.”

(Images courtesy of PageSoutherlandPage LLP)





Subscribe to ENR and get unlimited access to ENR.com

sponsors

 |   |   |   |   | 
2008 © The McGraw-Hill Companies, Inc.
All Rights Reserved